A Novel Method for Fabrication of Ultrafine Metal Lines by Electron Beams
Sedgwick, T. O., Broers, A. N., Agule, B. J.Volume:
119
Year:
1972
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2404096
File:
PDF, 1000 KB
english, 1972