Fabrication of SOI Films with High Crystal Uniformity by...

Journal of The Electrochemical Society 2003 Vol. 150; Iss. 5

Fabrication of SOI Films with High Crystal Uniformity by High-Speed Zone-Melting Crystallization

Yokoyama, Shuhei, Ihara, Manabu, Izumi, Koichi, Komiyama, Hiroshi, Yokoyama, Chiaki
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Volume:
150
Year:
2003
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1566015
File:
PDF, 1002 KB
english, 2003
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