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[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - Sidewall-implanted dual-axis piezoresistive cantilever for AFM data storage readback and tracking
Chui, B.W., Mamin, H.J., Terris, B.D., Rugar, D., Kenny, T.W.Year:
1998
Language:
english
DOI:
10.1109/memsys.1998.659721
File:
PDF, 727 KB
english, 1998