[IEEE 18th IEEE International Conference on Micro Electro...

[IEEE 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Miami Beach, FL, USA (Jan. 30 - Feb. 3, 2005)] 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Micromachined fountain pen as a tool for atomic force microscope based nanoelectrochemical metal deposition

Deladi, S., Tas, N.R., Berenschot, J.W., de Boer, J.H., de Boer, M.J., Krijnen, G.J.M., Elwenspoek, M.C.

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Year:

2005

Language:

english

DOI:

10.1109/memsys.2005.1453992

File:

PDF, 716 KB

english, 2005

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