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[IEEE 2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, HI, USA (18-21 Aug. 2003)] 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682) - A two-axis electrothermal SCS micromirror for biomedical imaging
Jain, A., Tuqiang Xie,, Yingtian Pan,, Fedder, G.K., Huikai Xie,Year:
2003
Language:
english
DOI:
10.1109/omems.2003.1233444
File:
PDF, 311 KB
english, 2003