PZT MEMS for an Extremely Sensitive Magnetometer

Integrated Ferroelectrics 2003 / 04 Vol. 54; Iss. 1

PZT MEMS for an Extremely Sensitive Magnetometer

Zakar, Eugene, Polcawich, Ronald, Dubey, Madan, Pulskamp, Jeff, Wickenden, Alma, Conrad, John, Piekarz, Richard, Wickenden, Dennis, Champion, John
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Volume:
54
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580390259146
Date:
April, 2003
File:
PDF, 244 KB
english, 2003
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