Kinetic Monte Carlo simulation for the striation distribution of void defects in Czochralski silicon growth
Lee, Sang Hun, Oh, Hyun Jung, Kim, Do HyunVolume:
36
Language:
english
Journal:
Molecular Simulation
DOI:
10.1080/08927021003720512
Date:
August, 2010
File:
PDF, 1.09 MB
english, 2010