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[IEEE 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Miami Beach, FL, USA (Jan. 30 - Feb. 3, 2005)] 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Radio frequency power sensor based on mems technology with ultra low losses
Fernandez, L., Sese, J., Wiegerink, R., Flokstra, J., Jansen, H., Etwenspoek, M.Year:
2005
Language:
english
DOI:
10.1109/memsys.2005.1453899
File:
PDF, 768 KB
english, 2005