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Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field
Beyeler, Felix, Neild, Adrian, Oberti, Stefano, Bell, Dominik J., Sun, Yu, Dual, Jrg, Nelson, Bradley J.Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.885853
Date:
February, 2007
File:
PDF, 5.47 MB
english, 2007