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[IEEE 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Singapore (2006.7.3-2006.7.3)] 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Diffractive lenses for high resolution laser based failure analysis
Zachariasse, Frank, Goossens, MartijnYear:
2006
Language:
english
DOI:
10.1109/ipfa.2006.251006
File:
PDF, 1.83 MB
english, 2006