[IEEE 2008 10th Electronics Packaging Technology Conference (EPTC) - Singapore, Singapore (2008.12.9-2008.12.12)] 2008 10th Electronics Packaging Technology Conference - Finite Element Analysis of Alternating Phase-Shift Masks Subjected to Dynamic Pressure Loading Due to Megasonic Cleaning
Yin, X., Komvopoulos, K.Year:
2008
Language:
english
DOI:
10.1109/eptc.2008.4763473
File:
PDF, 3.72 MB
english, 2008