[IEEE 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Shenzhen, China (2009.01.5-2009.01.8)] 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Novel synthesis design of a 3-DOF silicon piezoresistive micro accelerometer
Tran, Tan D., Nguyen, Minh D., Nguyen, Long T., Huynh, Tue H., Nguyen, Thuy P.Year:
2009
Language:
english
DOI:
10.1109/nems.2009.5068538
File:
PDF, 5.86 MB
english, 2009