[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - A new silicon rate gyroscope
Geiger, W., Folkmer, B., Merz, J., Sandmaier, H., Lang, W.Year:
1998
Language:
english
DOI:
10.1109/memsys.1998.659828
File:
PDF, 830 KB
english, 1998