[IEEE 2010 23rd IEEE ICMTS International Conference on Microelectronic Test Structures (ICMTS 2010) - Hiroshima (2010.03.22-2010.03.25)] 2010 International Conference on Microelectronic Test Structures (ICMTS) - Highly automated sequence for Phase Change Memory test structure characterization
Toffoli, A, Fantini, A, Betti Beneventi, G, Perniola, L, Kies, R, Vidal, V, Nodin, J F, Sousa, V, Persico, A, Cluzel, J, Jahan, C, Maitrejean, S, Reimbold, G, DeSalvo, B, Boulanger, FYear:
2010
Language:
english
DOI:
10.1109/icmts.2010.5466865
File:
PDF, 329 KB
english, 2010