[IEEE IEEE 1998 Position Location and Navigation Symposium...

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[IEEE IEEE 1998 Position Location and Navigation Symposium - Palm Springs, CA, USA (20-23 April 1998)] IEEE 1998 Position Location and Navigation Symposium (Cat. No.98CH36153) - A area variable capacitive microaccelerometer with force-balancing electrodes

Byeoungju Ha,, Yongsoo Oh,, Byeungleul Lee,, Park, K.Y., Seongsoon Baek,, Seoungdo Ann,, Cimoo Song,, Janggyu Lee,
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Year:
1998
Language:
english
DOI:
10.1109/plans.1998.670035
File:
PDF, 612 KB
english, 1998
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