[IEEE IEEE 1998 Position Location and Navigation Symposium - Palm Springs, CA, USA (20-23 April 1998)] IEEE 1998 Position Location and Navigation Symposium (Cat. No.98CH36153) - A area variable capacitive microaccelerometer with force-balancing electrodes
Byeoungju Ha,, Yongsoo Oh,, Byeungleul Lee,, Park, K.Y., Seongsoon Baek,, Seoungdo Ann,, Cimoo Song,, Janggyu Lee,Year:
1998
Language:
english
DOI:
10.1109/plans.1998.670035
File:
PDF, 612 KB
english, 1998