[IEEE 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings - San Francisco, CA, USA (6-8 Oct. 1997)] 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) - Esprit-Semiconductor Equipment Assessment (SEA): "bridging the process innovation-equipment productivity gap"
Bruchez, J., Kelm, G.Year:
1997
Language:
english
DOI:
10.1109/issm.1997.664492
File:
PDF, 670 KB
english, 1997