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[IEEE 2013 10th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE) - Mexico City, Mexico (2013.09.30-2013.10.4)] 2013 10th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE) - Effect of changing the material and device's properties on the performance of polysilicon-based MicroActuators
Baez Alvarez, Carlos Ramon, Linares Aranda, Monico, Calleja Arriaga, Wilfrido, Molina Reyes, JoelYear:
2013
Language:
english
DOI:
10.1109/iceee.2013.6676054
File:
PDF, 1.20 MB
english, 2013