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[IEEE 2007 IEEE International Conference on Microelectronic Test Structures - Bunkyo-ku, Japan (2007.03.19-2007.03.22)] 2007 IEEE International Conference on Microelectronic Test Structures - A Systematic Approach to Accurate Evaluation of CD-Metrology Tools

Orji, Ndubuisi G., Bunday, Benjamin D., Dixson, Ronald G., Allgair, John A.
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Year:
2007
Language:
english
DOI:
10.1109/icmts.2007.374446
File:
PDF, 4.12 MB
english, 2007
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