Electron-Beam-Induced Freezing of an Aromatic-Based EUV...

IEEE Transactions on Nanotechnology 2012 / 11 Vol. 11; Iss. 6

Electron-Beam-Induced Freezing of an Aromatic-Based EUV Resist: A Robust Template for Directed Self-Assembly of Block Copolymers

Han-Hao Cheng,, Anguang Yu,, Keen, I., Ya-Mi Chuang,, Jack, K. S., Leeson, M. J., Younkin, T. R., Blakey, I., Whittaker, A. K.
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Volume:
11
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2012.2216544
Date:
November, 2012
File:
PDF, 1.02 MB
english, 2012
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