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[IEEE 2008 IEEE 35th International Conference on Plasma Science (ICOPS) - Karlsruhe, Germany (2008.06.15-2008.06.19)] 2008 IEEE 35th International Conference on Plasma Science - Experimental study of xenon and tin discharge produced plasma EUV light source
Masato Watanabe,, Nozomu Kishi,, Junzaburo Yamada,, Osamu Sakuchi,, Jiang Fei,, Zhu Qiushi,, Akitoshi Okino,, Kazuhiko Horioka,, Eiki Hotta,Year:
2008
Language:
english
DOI:
10.1109/plasma.2008.4590703
File:
PDF, 48 KB
english, 2008