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[IEEE IEEE 1998 International Interconnect Technology Conference - San Francisco, CA, USA (1-3 June 1998)] Proceedings of the IEEE 1998 International Interconnect Technology Conference (Cat. No.98EX102) - Integration study of benzocyclobutene with CVD-based aluminum metallization
Gundlach, H., Knorr, A., Nijsten, S., Kumar, K., Bian, Z., Talevi, R., Shaffer, E.O., Kaloyeros, A.E., Geer, R.E.Year:
1998
Language:
english
DOI:
10.1109/iitc.1998.704922
File:
PDF, 482 KB
english, 1998