Micromachining of quartz plates: determination of a...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2000 / 09 Vol. 47; Iss. 5

Micromachining of quartz plates: determination of a database by combined stereographic analysis and 3-D simulation of etching shapes

Tellier, C.R., Leblois, T.G.
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Volume:
47
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/58.869067
Date:
September, 2000
File:
PDF, 3.71 MB
english, 2000
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