Nonlinear model reduction strategies for rapid thermal...

Nonlinear model reduction strategies for rapid thermal processing systems

Banerjee, S., Cole, J.V., Jensen, K.F.
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Volume:
11
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/66.670175
Date:
May, 1998
File:
PDF, 231 KB
english, 1998
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