[IEEE IEEE 1998 International Interconnect Technology Conference - San Francisco, CA, USA (1-3 June 1998)] Proceedings of the IEEE 1998 International Interconnect Technology Conference (Cat. No.98EX102) - Integration and reliability issues for low capacitance air-gap interconnect structures
Shieh, B.P., Bassman, L.C., Kim, D.-K., Saraswat, K.C., Deal, M.D., McVittie, J.P., List, R.S., Nag, S., Ting, L.Year:
1998
Language:
english
DOI:
10.1109/iitc.1998.704769
File:
PDF, 422 KB
english, 1998