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[IEEE 2010 International Conference on Microelectronic Test Structures (ICMTS) - Hiroshima, Japan (2010.03.22-2010.03.25)] 2010 International Conference on Microelectronic Test Structures (ICMTS) - On-wafer inductance and resistance characterization of sub-5pH deep silicon via (DSV)
Blaschke, Volker, Zwingman, RobertYear:
2010
Language:
english
DOI:
10.1109/icmts.2010.5466839
File:
PDF, 267 KB
english, 2010