[IEEE 1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-98 - Novosibirsk, Russia (1998.9.23-1998.9.26)] 1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-98 (Cat. No.98EX179) - Dynamic processes in the technology of film formation for optoelectronic elements
Orlikov, L.N., Orlikov, N.L.Year:
1998
Language:
english
DOI:
10.1109/apeie.1998.768916
File:
PDF, 152 KB
english, 1998