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[IEEE 2008 IEEE International Reliability Physics Symposium (IRPS) - Phoenix, AZ, USA (2008.04.27-2008.05.1)] 2008 IEEE International Reliability Physics Symposium - Scrubber clean process induced CDM ESD-like: CSM (Charged Surface Model) event caused by dummy patterns
Jian-Hsing Lee,, Shih, J.R., Chi-Lun Huang,, Hsieh, Sunnys, Wu, KennethYear:
2008
Language:
english
DOI:
10.1109/relphy.2008.4558904
File:
PDF, 631 KB
english, 2008