Preparation of wafer-level glass cavities by a low-cost...

Lab on a Chip 2011 Vol. 11; Iss. 8

Preparation of wafer-level glass cavities by a low-cost chemical foaming process (CFP)

Shang, Jintang, Chen, Boyin, Lin, Wei, Wong, Ching-Ping, Zhang, Di, Xu, Chao, Liu, Junwen, Huang, Qing-An
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Volume:
11
Year:
2011
Language:
english
Journal:
Lab on a Chip
DOI:
10.1039/c0lc00708k
File:
PDF, 335 KB
english, 2011
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