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[ACS Symposium Series] Plasma Polymerization Volume 108 || Thermal Modification of Plasma-Polymerized Organosilazane Thin Films
Shen, Mitchel, Bell, Alexis T.Volume:
10.1021/bk
Year:
1979
Language:
english
DOI:
10.1021/bk-1979-0108.ch014
File:
PDF, 987 KB
english, 1979