Design, Fabrication, and Characterization of a Rotary...

Journal of Microelectromechanical Systems 2008 / 06 Vol. 17; Iss. 3

Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings

Ghalichechian, N., Modafe, A., Beyaz, M.I., Ghodssi, R.
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Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2008.916346
Date:
June, 2008
File:
PDF, 1.29 MB
english, 2008
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