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Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings
Ghalichechian, N., Modafe, A., Beyaz, M.I., Ghodssi, R.Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2008.916346
Date:
June, 2008
File:
PDF, 1.29 MB
english, 2008