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[IEEE ESSDERC 2011 - 41st European Solid State Device Research Conference - Helsinki, Finland (2011.09.12-2011.09.16)] 2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC) - ALD high-k layer grating couplers for single and double slot on-chip SOI photonics
Naiini, Maziar M., Henkel, Christoph, Malm, Gunnar B., Ostling, MikaelYear:
2011
Language:
english
DOI:
10.1109/essderc.2011.6044202
File:
PDF, 808 KB
english, 2011