[IEEE 2012 12th International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) - Shanghai, China (2012.08.28-2012.08.31)] 2012 12th International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) - An evaluation of photoresist thickness for semiellipsoid microlens fabrication before thermal reflow using the prolate spheroid approximation

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