Fabrication and characterization of a micromechanical...

Journal of Microelectromechanical Systems 2002 / 12 Vol. 11; Iss. 6

Fabrication and characterization of a micromechanical sensor for differential detection of nanoscale motions

Savran, C.A., Sparks, A.W., Sihler, J., Jian Li,, Wan-Chen Wu,, Berlin, D.E., Burg, T.P., Fritz, J., Schmidt, M.A., Manalis, S.R.
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Volume:
11
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2002.805057
Date:
December, 2002
File:
PDF, 620 KB
english, 2002
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