[IEEE ASDAM'02 (4th International Conference on Advanced Semiconductor Devices and Microsystems) - Smolenice Castle, Slovakia (14-16 Oct. 2002)] The Fourth International Conference on Advanced Semiconductor Devices and Microsystem - Studies of dielectric characteristics of spin-coated polyimide films
Matay, L.Year:
2002
Language:
english
DOI:
10.1109/asdam.2002.1088481
File:
PDF, 167 KB
english, 2002