![](/img/cover-not-exists.png)
Development of miniaturized piezoelectric actuators for optical applications realized using LIGA technology
Debeda, H., Freyhold, T.v., Mohr, J., Wallrabe, U., Wengelink, J.Volume:
8
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.788629
Date:
January, 1999
File:
PDF, 459 KB
english, 1999