Development of miniaturized piezoelectric actuators for...

Journal of Microelectromechanical Systems 1999 / Sept. Vol. 8; Iss. 3

Development of miniaturized piezoelectric actuators for optical applications realized using LIGA technology

Debeda, H., Freyhold, T.v., Mohr, J., Wallrabe, U., Wengelink, J.
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Volume:
8
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.788629
Date:
January, 1999
File:
PDF, 459 KB
english, 1999
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