[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - “Membrane micro emboss following excimer laser ablation (MeME-X) process” for pressure-driven micro active catheter
Masashi Ikeuchi,, Koji Ikuta,Year:
2008
Language:
english
DOI:
10.1109/memsys.2008.4443593
File:
PDF, 1.32 MB
english, 2008