Radical diffusion limits to photoinhibited superresolution...

Radical diffusion limits to photoinhibited superresolution lithography

Forman, Darren L., Cole, Michael C., McLeod, Robert R.
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Volume:
15
Year:
2013
Language:
english
Journal:
Physical Chemistry Chemical Physics
DOI:
10.1039/c3cp51512e
File:
PDF, 1.65 MB
english, 2013
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