Small-Signal Impedance of a Radio Frequency Plasma...

IEEE Microwave and Wireless Components Letters 2007 / 11 Vol. 17; Iss. 11

Small-Signal Impedance of a Radio Frequency Plasma Capacitor

Linardakis, P., Borg, G.G.
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Volume:
17
Language:
english
Journal:
IEEE Microwave and Wireless Components Letters
DOI:
10.1109/lmwc.2007.908042
Date:
November, 2007
File:
PDF, 217 KB
english, 2007
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