A Virtual Metrology System for Predicting End-of-Line...

IEEE Transactions on Industrial Informatics 2011 / 05 Vol. 7; Iss. 2

A Virtual Metrology System for Predicting End-of-Line Electrical Properties Using a MANCOVA Model With Tools Clustering

Pan, Tian-Hong, Sheng, Bi-Qi, Wong, David Shan-Hill, Jang, Shi-Shang
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Volume:
7
Language:
english
Journal:
IEEE Transactions on Industrial Informatics
DOI:
10.1109/tii.2010.2098416
Date:
May, 2011
File:
PDF, 1.16 MB
english, 2011
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