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Comparative study of the sputtering process in the conventional and microwave-coupled hollow-cathode discharge
Caroli, Sergio, Senofonte, Oreste, Violante, Nicola, Falasca, Oriano, Marconi, Achille, Barbieri, MauroVolume:
1
Year:
1986
Language:
english
Journal:
Journal of Analytical Atomic Spectrometry
DOI:
10.1039/ja9860100231
File:
PDF, 1.35 MB
english, 1986