Bulk trap formation by high temperature annealing of buried...

IEEE Transactions on Nuclear Science 1995 / Dec. Vol. 42; Iss. 6

Bulk trap formation by high temperature annealing of buried thermal oxides [SIMOX]

Stahlbush, R.E., Brown, G.A.
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Volume:
42
Language:
english
Journal:
IEEE Transactions on Nuclear Science
DOI:
10.1109/23.488769
Date:
January, 1995
File:
PDF, 1.30 MB
english, 1995
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