[IEEE kshop on Junction Technology - Osaka, Japan...

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[IEEE kshop on Junction Technology - Osaka, Japan (2005.06.7-2005.06.8)] Extended Abstracts of the Fifth International Workshop on Junction Technology - Simulation of high-temperature millisecond annealing based on an atomistic modeling of boron diffusion in silicon

Hane, M., Ikezawa, T.
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Year:
2005
Language:
english
DOI:
10.1109/iwjt.2005.203881
File:
PDF, 1.97 MB
english, 2005
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