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[IEEE 2007 Ph.D Research in Microelectronics and Electronics Conference - (2007.07.2-2007.07.5)] 2007 Ph.D Research in Microelectronics and Electronics Conference - Microbeam dynamic shaping by closed-loop electrostatic actuation using modal control
Kharrat, Chady, Colinet, Eric, Voda, AlinaYear:
2007
Language:
english
DOI:
10.1109/rme.2007.4401846
File:
PDF, 190 KB
english, 2007