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A Particle Flow Velocity Profiler Using In-Channel Electrodes With Unevenly Divided Interelectrode Gaps
Kim, Taeyoon, Cho, Young-HoVolume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2008.924272
Date:
June, 2008
File:
PDF, 691 KB
english, 2008