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Effect of tilt angle variations in a halo implant on V/sub th/ values for 0.14-μm cmos devices
Santiesteban, R.S., Abeln, G.C., Beatty, T.E., Rodriguez, O.Volume:
16
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2003.818958
Date:
November, 2003
File:
PDF, 241 KB
english, 2003