Surface Modification of DLC Film Due to Oxygen-Plasma...

IEEE Transactions on Plasma Science 2012 / 10 Vol. 40; Iss. 10

Surface Modification of DLC Film Due to Oxygen-Plasma Exposure, Observed by IR Absorption Spectroscopy in Multiple-Internal-Reflection Geometry

Shinohara, Masanori, Takaki, Yu-ya, Takami, Yoshiki, Matuda, Yoshinobu, Fujiyama, Hiroshi
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Volume:
40
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2012.2208766
Date:
October, 2012
File:
PDF, 447 KB
english, 2012
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