Effects of elevated temperature treatments in...

Journal of Microelectromechanical Systems 1995 / 6 Vol. 4; Iss. 2

Effects of elevated temperature treatments in microstructure release procedures

Abe, T., Messner, W.C., Reed, M.L.
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Volume:
4
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.388114
Date:
June, 1995
File:
PDF, 1.17 MB
english, 1995
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