[IEEE IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - San Francisco, CA, USA (Dec. 13-15, 2004)] IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - An electrothermally-actuated, dual-mode micromirror for large bi-directional scanning
Ankur Jain,, Todd, S., Huikai Xie,Year:
2004
Language:
english
DOI:
10.1109/iedm.2004.1419060
File:
PDF, 270 KB
english, 2004