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[IEEE Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 - Taiwan (5-8 July 2004)] Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 (IEEE Cat. No.04TH8743) - Effects of base oxide in HfSiO/SiO/sub 2/ high-k gate stacks
Wu, W.H., Chen, M.C., Wang, M.F., Hou, T.H., Yao, L.G., Jin, Y., Chen, S.C., Liang, M.S.Year:
2004
Language:
english
DOI:
10.1109/ipfa.2004.1345526
File:
PDF, 197 KB
english, 2004