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[IEEE 2006 IEEE International Behavioral Modeling and Simulation Workshop - San Jose, CA, USA (2006.09.14-2006.09.15)] 2006 IEEE International Behavioral Modeling and Simulation Workshop - Modeling of Spring Constant and Pull-down Voltage of Non uniform RF MEMS Cantilever
Saha, Shimul, Hanke, Ulrik, Jensen, Geir, Saether, TrondYear:
2006
Language:
english
DOI:
10.1109/bmas.2006.283470
File:
PDF, 4.55 MB
english, 2006